Automatic Alignment of Double Optical Paths in Excimer Laser Amplifier

May 2013 in “ Proceedings of SPIE ”

Dahui Wang, Xueqing Zhao, Hengqi Hua … Jun Zhao

Studysummary In this study, the researchers demonstrated an automatic alignment method for beams in an electron pumped excimer laser system that achieved high precision and accuracy, with a reported alignment accuracy of 0.63μrad.

Automatically generated from the study's abstract, not written by a person, and not a review of the full paper. Not medical advice or a treatment recommendation. Read the original study, and consult a qualified healthcare professional before changing treatment. Full disclaimer ·

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