A Highly Sensitive MEMS Silicon-Hair Device Reproducing the Function of Hair Follicle

August 2019 in “ Electronics and Communications in Japan ”

Koki Hamamoto, Kyohei Terao, Fusao Shimokawa, Hidekuni Takao

MEMS silicon-hair hair follicle piezoresistors surface tension electrostatic attraction

TLDR The device mimics human hair follicles and detects tiny forces and moments with high sensitivity.

The study reported the development of a highly sensitive MEMS silicon-hair device that mimicked the functions of a human hair follicle. This device featured fine silicon-hair with dimensions of 10 µm in width and 5 mm in length, capable of detecting two-axis force and one-axis moment through piezoresistors. It achieved resolutions of 5 µN for axial force, 1 µN for shear force, and 3 nN·m for moment. The device successfully measured surface tension similar to that of water and ethanol water solutions and detected electrostatic attraction as low as 0.1 µN. The sensitivity for shear force and moment was enhanced tenfold by employing resonance-drive of the silicon-hair.

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