A Highly Sensitive MEMS Silicon-Hair Device Reproducing the Function of Hair Follicle

The study developed a MEMS silicon-hair device that replicated the function of human hair follicles as high-sensitivity sensors. The device featured a fine silicon hair capable of detecting two-axis forces and moments with high sensitivity, surpassing human perception limits. It successfully measured weak electrostatic attractions and liquid viscosity differences, demonstrating potential applications in remote communication and tactile sensation measurement. The study suggested further research to improve measurement accuracy and proposed future integration of multiple devices to enhance wind turbulence estimation and error reduction.