A Highly Sensitive MEMS Silicon-Hair Device Reproducing the Function of Hair Follicle
June 2019
in “
IEEJ Transactions on Sensors and Micromachines
”
Studysummary This study reports the development of a MEMS silicon-hair device capable of detecting minute forces and moments, replicating the sensory functions of human hair follicles with high sensitivity.
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The study reported the development of a highly sensitive MEMS silicon-hair device designed to replicate the functions of a human hair follicle. This device featured fine silicon-hair with dimensions of 10µm in width and 5mm in length, capable of detecting 2-axis force and 1-axis moment through piezoresistors. It achieved high resolutions of 5µN for axial force, 1µN for shear force, and 3nN･m for moment. The device successfully measured surface tension similar to that of water and ethanol water solutions and detected electrostatic attraction as low as 0.1µN. The sensitivity of shear force and moment detection was enhanced tenfold by employing resonance-drive technology.
