Automatic Alignment of Double Optical Paths in Excimer Laser Amplifier
May 2013
in “
Proceedings of SPIE
”
TLDR Researchers created a system that accurately aligns laser beams automatically.
In 2013, researchers developed an automatic beam alignment system for excimer laser amplifiers, which used two cross-hairs and CCDs to correct alignment errors through a feedback control mechanism. The system achieved an alignment accuracy of 0.63µrad and a maximum beam restoration error of 13.75µm. The precision of the system increased with the distance between the cross-hairs, which was 16 meters in the setup. This method was successfully implemented in a high power excimer laser system, demonstrating its effectiveness for precise beam alignment.
