Automatic Alignment of Double Optical Paths in Excimer Laser Amplifier

    May 2013 in “ Proceedings of SPIE
    Dahui Wang, Xueqing Zhao, Hengqi Hua, Yongsheng Zhang, Yun Hu, Aiping Yi, Jun Zhao
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    Studysummary In this study, the researchers demonstrated an automatic alignment method for beams in an electron pumped excimer laser system that achieved high precision and accuracy, with a reported alignment accuracy of 0.63μrad.
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